High aspect ratio silicon ring-shape micropillars fabricated by deep reactive ion etching with sacrificial structures - ScienceDirect

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PDF) Recent Advances in Reactive Ion Etching and Applications of

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Figure 2 from Ultra Deep Reactive Ion Etching of High Aspect-Ratio

Ultra Deep Reactive Ion Etching of High Aspect-Ratio and Thick

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PDF] An advanced reactive ion etching process for very high aspect