AFM images of Al₂O₃/Gr after ALD cycles, each cycle with pre-H₂O

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AFM morphology of Al2O3 thin films grown by ALD at 150 °C (a) and 300

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a) AFM morphology and representative b) height linescan of Al2O3

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AFM morphologies of Al2O3 simultaneously deposited at 250 °C by 80 ALD

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The growth-per-cycle (GPC) as a function of temperature adopted from