Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect
Improved PDMS mold fabrication by direct etch with nanosphere self-assembly mask for Soft UV-NIL subwavelength metasurfaces fabrication - ScienceDirect
PDF) Nanoimprint Lithography
Process flow (A) master mold fabrication by soft-lithography technique
A) Mold fabrication by photolithography process: SU8 photoresist
Polymers, Free Full-Text
Nanoimprint lithography for nanodevice fabrication
Soft UV Nanoimprint Lithography and Its Applications
Polymers in conventional and alternative lithography for the
Continuous roller nanoimprinting: next generation lithography - Nanoscale (RSC Publishing) DOI:10.1039/D2NR06380H
Perovskite micro-/nanoarchitecture for photonic applications - ScienceDirect
Dielectric metasurfaces: From wavefront shaping to quantum platforms - ScienceDirect
Nanomaterials, Free Full-Text
Soft lithography fabrication diagram. First, a master mold is created
Polymers in conventional and alternative lithography for the fabrication of nanostructures - ScienceDirect