Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
![](https://media.springernature.com/m685/springer-static/image/art%3A10.1038%2Fs41378-023-00486-3/MediaObjects/41378_2023_486_Figa_HTML.png)
![](https://d3i71xaburhd42.cloudfront.net/d90ff96c5ea67e725144871f48d2d9383e42272f/3-Figure6-1.png)
Figure 3 from Eigenmode operation as a quadrature error cancellation technique for piezoelectric resonant gyroscopes
![](https://d3i71xaburhd42.cloudfront.net/b54d89c644e0e23e947b4c865c34526b9178796a/1-Figure1-1.png)
![](https://www.researchgate.net/publication/221749933/figure/fig4/AS:213902974558215@1428009851325/Secondary-control-loops-of-the-HRG-including-Quadrature-Control-Loop-and-Rebalance.png)
Secondary control loops of the HRG including Quadrature Control Loop
![](https://media.springernature.com/m685/springer-static/image/art%3A10.1038%2Fmicronano.2016.92/MediaObjects/41378_2017_Article_BFmicronano201692_Fig7_HTML.jpg)
Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
![](https://www.researchgate.net/publication/368694837/figure/fig1/AS:11431281121682669@1677069860356/Frequency-response-measurement-results-a-The-as-born-frequency-response-from-a-device_Q320.jpg)
PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
![](https://i1.rgstatic.net/ii/profile.image/278415035912194-1443390725189_Q64/Yaesuk-Jeong.jpg)
PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
![](https://www.researchgate.net/publication/372131287/figure/fig5/AS:11431281175210140@1689645385820/Relation-between-the-negative-polarity-applied-voltage-to-the-piezoelectric-actuator-and_Q320.jpg)
Temperature characterization plots for the AlN-on-Si resonant
![](https://d3i71xaburhd42.cloudfront.net/b54d89c644e0e23e947b4c865c34526b9178796a/4-Table1-1.png)
![](https://media.springernature.com/m685/springer-static/image/art%3A10.1038%2Fs41378-020-00204-3/MediaObjects/41378_2020_204_Fig6_HTML.png)
Eigenmode operation of piezoelectric resonant gyroscopes
![](https://i1.rgstatic.net/ii/profile.image/279398201741316-1443625130316_Q64/Arashk-Norouzpour-Shirazi.jpg)
PDF) Multi-coefficient eigenmode operation—breaking through 10°/h open-loop bias instability in wideband aluminum nitride piezoelectric BAW gyroscopes
![](https://media.springernature.com/m685/springer-static/image/art%3A10.1038%2Fs41378-020-00204-3/MediaObjects/41378_2020_204_Fig8_HTML.png)
Eigenmode operation of piezoelectric resonant gyroscopes
![](https://media.springernature.com/m685/springer-static/image/art%3A10.1038%2Fmicronano.2016.92/MediaObjects/41378_2017_Article_BFmicronano201692_Fig6_HTML.jpg)
Resonant pitch and roll silicon gyroscopes with sub-micron-gap slanted electrodes: Breaking the barrier toward high-performance monolithic inertial measurement units
![](https://d3i71xaburhd42.cloudfront.net/616790f9fabc945a15446e47e28c19b6a6899195/3-Figure5-1.png)
A 0.5MHz mode-matched pitch or roll annulus gyroscope with nano-gap slanted electrodes for quadrature cancellation
![](https://www.researchgate.net/publication/301644852/figure/fig13/AS:362344661176325@1463401107479/Variation-of-the-scale-factor-and-offset-of-an-SD-BAW-gyroscope-as-temperature-varies.png)
Variation of the scale factor and offset of an SD-BAW gyroscope as
![](https://www.researchgate.net/publication/363825921/figure/fig5/AS:11431281086457896@1664231192430/a-The-schematic-for-multi-coefficient-eigenmode-operation-circuitry-board-b-The.png)
a) The schematic for multi-coefficient eigenmode operation circuitry